The FEMAG/PVT software is dedicated to the simulation of the Physical Vapour Transport process.

The FEMAG/PVT software is used to design new hot zones and recipes taking into account specific business and technical issues, such as: 

.Concerning the semitransparency
.Concerning the gas flow computation
.Gas inlets and outlets can be horizontal, vertical or oblique
.The gas flow can be computed in specific gas enclosures
.Concerning the induction heating
.Concerning the heat transfer coefficient between macroelements
.Computational modules have been compiled with large parameters



Temperature field in the SiC deposition enclosure

Inductor voltage: 30 V each

Gas pressure: 0.015 bar in the growth chamber

Flow rate: 0.004 std m3/sec in the outer enclosure

No semi-transparent computations